EcoCoat®
Configure EcoCoat® systems for versatile volume production across a wide range of applications that require precise surface modification. Ensure highly stable processes and deposition uniformity. Cost-effectively scale up to high-volume production.
Datasheet and Specs

Silane Monolayer Deposition System

The YES EcoCoat® system provides excellent control of the process environment by combining the latest advances in chemical vapor deposition technologies with YES plasma cleaning. This minimizes chemical usage while achieving a consistent substrate surface. It also creates the flexibility to use a wide range of organosilanes in small sample sizes to help significantly improve the cost-effectiveness for research applications requiring precise surface modification. When ready to scale to high-volume production, transition seamlessly up to the high-volume production UltraCoat system.

Precise Controls

YES EcoCoat® systems allow for precise control over temperature and the hydrolysis process. Hydration of the surface can be controlled so that the vapor-deposited coating provides a superior silane/substrate bond that is stable after exposure to atmospheric moisture, extending the time available between process steps. This critical advantage is leveraged by YES customers for mission-critical applications in genomics, medical devices, MEMS, autonomous vehicles, and more.

FEATURES
  • Coating temperatures up to 200° C
  • Coating process environment: <1Torr-100Torr
  • Control of amount and speed of injection, vapor line temperature, and vaporization flask temperature
  • >100 chemical processes developed using organosilanes, including PEG and biotin functional compounds
  • Coatings compatible with a wide range of substrate materials including glass, silicon and organopolymers (PC, PP, COP/COC, PMMA etc.)
  • 40 kHz plasma with multiple process gas inputs and optional flow control using MFCs
  • Eco-friendly “green” process
  • Coating Process 100 mT – 100 T
BENEFITS
  • Monolayer coatings at Angstrom-level thickness
  • ±1.5% temperature uniformity
  • Consistent and repeatable process
  • Chemical deposition uniformity
  • Contact angle control within +/- 3 degrees
  • Reduced chemical usage over wet chemical processes
  • Plasma cleaning option ensures a consistent substrate surface prior to coating
APPLICATIONS
  • Silane surface monolayers enable stable, covalent linkage between solid substrates and biomolecules including DNA and protein for microarray manufacture
  • Genomic sequencing flow cell manufacture using uniform silane vapor coatings to achieve consistent biomolecular sample flow through microchannels
  • Selection of silane coating chemistry allows precise tuning of surface hydrophobicity to control fluid flow and promote/prevent adhesion
  • Photoresist adhesion
  • Adhesion layer between polymers and substrate
SECTORS
  • Conventional Lithography
  • MEMS
  • Biotech and Life Sciences
  • MicroLED
  • Semiconductor
  • Optical Applications
  • Image Reversal

YES Sales

Talk to one of our sales representatives about how the EcoCoat® can meet your application needs. When you are ready to run process tests, we would be happy to arrange a demonstration using your chemicals and samples.
REQUEST A DEMO
Contact a YES Customer Development Center
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